Bench-top SEM IM-60 (Max.60k)

 
     
 

 

 IM-60 is an advanced model that satisfies a variety of analysis purposes. The SE (secondary electrons) detector and BSE (backscattered electrons) detector can be mounted selectively.The basic stage is composed of three (manual) axes: X, Y, R. You can change the configuration to a five-axis automatic stage with additional Z and Tilt axes as necessary.

You can also change the configuration to either the tabletop type or tower (carrier) type, according to the purpose and install environment.

SPECIFICATION:

 

Model

IM-60-SM

 

 

I. Major Features:

 

1. Detector

SE

2. Stage System (Storke)

X,Y(40㎜), R(360˚)  3-axis Manual

3. Resolution

10nm

4. Accelerating Voltage

5~30kV

5. Magnifications

20x~60,000x

6. Maximum Sample Size

80㎜(D) x 40㎜(H)

 

 

II. Electron Optics:

 

1. Electron Gun

Tungsten(W) Filament

2. Aperture(O.L)

Single Type

3. Beam Shift

X.Y 100㎛ (±50)

 

 

III. Image System:

 

1. Image Diplay

22inch LCD

2. Image Fomat

BMP,JPEG,PNG,TIFF

3. OS

Windows10

4. Scan Mode

320×240,640×480,1280×960,2560×1280,5120×3840

5. Automation Function

Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil)

 

 

V. Vacuum:

 

1. Vacuum mode

High Vacuum

2. Pump System

Initial Vacuum : Rotary(100L),

 

High Vacuum : Turbo Molecular(80L) / Full Automation

 

 

VI. Dimensions:

 

1. SEM

480(W)x480(D)x1180㎜, 90kg

2. Rotary Pump

400(W)x160(D)x340(H)㎜, 24kg

 

 

VII. Additional:

 

1. SEM

CCD CAMERA(Navigation mode), Analysis Joystick Controller

2. Option

Low Vacumm, EDS, Cooling Stage, STEM Dectector

 

 

Accessories:

  • EDS

  • Ion Sputter Coater

 
   

 

 

 

 
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