Bench-top SEM IM-150 (Max.150k)

 
     
 

IM-150 is a model to provide high-resolution images as high as 150,000 Magnification at maximum. Equipped with cutting-edge technology, Tthis model is suitable for observation of the shapes of fine nanoparticles. Use the five automated transport axes to quickly locate the position of analysis and acquire high-resolution images that are equivalent to general SEM images. Decide and customize main features according to your analysis conditions and usage.

SPECIFICATION:

 

 

 

 

 

IM-150 SERIES

Modle

IM-150-SM

IM-150-DM

IM-150-SA

IM-150-DA

 

 

 

 

 

I. Major Features: 

1. Detector

SE

SE+BSE

SE

SE+BSE

2. Stage System (Storke)

X,Y(40㎜), R(360˚)

X,Y(40㎜), R(360˚)

X,Y(40㎜), R(360˚),

X,Y(40㎜), R(360˚),

 3-axis Manual

 3-axis Manual

Z (0~40㎜), Tilt(0~60˚)

Z (0~40㎜), Tilt(0~60˚)

 

 

 5-axis Motorized

 5-axis Motorized

3. Resolution

       5nm

4. Accelerating Voltage

       1~30kV

5. Magnifications

       20x~150,000x

6. Maximum Sample Size

       80㎜(D) x 40㎜(H)

 

 

 

 

 

II. Electron Optics:

1. Electron Gun

Tungsten(W) Filament

2. Aperture(O.L)

Variable Type (30/50/50/100㎛)

3. Beam Shift

X.Y 100㎛ (±50)

 

 

 

 

 

III. Image System:

1. Image Diplay

22inch LCD

2. Image Fomat

BMP,JPEG,PNG,TIFF

3. OS

Windows10

4. Scan Mode

320×240,640×480,1280×960,2560×1280,5120×3840

5. Automation Function

Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil)

 

 

 

 

 

V. Vacuum:

1. Vacuum mode

High Vacuum

2. Pump System

Initial Vacuum : Rotary(100L),

High Vacuum : Turbo Molecular(80L) / Full Automation

 

 

 

 

 

VI. Dimensions:

1. SEM

480(W)x480(D)x1180㎜, 90kg

2. Rotary Pump

400(W)x160(D)x340(H)㎜, 24kg

 

 

 

 

 

VII. Additional:

1. SEM

CCD CAMERA(Navigation mode), Analysis Joystick Controller

2. Option

Low Vacumm, EDS, Cooling Stage, STEM Dectector

 
   

 

 

 

 
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